Variance reduction using wafer patterns in I_ddQ data

نویسندگان

  • W. Robert Daasch
  • James McNames
  • Daniel Bockelman
  • Kevin Cota
چکیده

The subject of this paper is IddQ testing for deep submicron CMOS technologies. The key concept introduced is the need to reduce the variance of good and faulty IddQ distributions. Other IddQ based techniques are reviewed within the context of variance reduction. Using the SEMATECH data and production data, variance reduction techniques are demonstrated. The main contribution of the paper is the systematic use of the die location and patterns in the IddQ data to reduce variance. Variance reduction is completed before any IddQ threshold limits are set.

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تاریخ انتشار 2000